


P hom M6 monocrystalline silicon hnub ci wafer nrog ntev 166mm thiab txoj kab uas hla 223mm yog 12.21% loj dua M2 wafer. nws txhais tau hais tias lub hnub ci hlwb ua los ntawm M6 substrate yuav muaj 12.21% siab zog tsim dua li ua ntawm M2 substrate.
1 Cov khoom muaj zog
Cov cuab yeej | Specification | Kev Soj Ntsuam Cov Qauv |
Txoj kev loj hlob | CZ | |
Crystallinity | Monocrystalline | Qhov Tshaj Tawm Etch Txuj Ci(ASTM F47-88) |
Kev Coj Yam | P-hom | Napson EC-80TPN P/N |
Dopant | Boron, Gallium | - |
Cov pa oxygen [Oi] | ≦8E+17 ntawm / cm3 | FTIR (ASTM F121-83) |
Cov pa roj carbon concentration [Cs] | ≦5E+16 ntawm / cm3 | FTIR (ASTM F123-91) |
Etch qhov ceev (dislocation ntom) | ≦500 cm-3 | Qhov Tshaj Tawm Etch Txuj Ci(ASTM F47-88) |
Kev taw qhia sab npoo | & lt; 100> ± 3 ° | Kev Siv Tshuab Xaj Hluav Taws Xob (ASTM F26-1987) |
Qhia ntawm pseudo square sab | & lt; 010> ;,< 001=""> ± 3 ° | Kev Siv Tshuab Xaj Hluav Taws Xob (ASTM F26-1987) |
2 Cov khoom hluav taws xob
Cov cuab yeej | Specification | Kev Soj Ntsuam Cov Qauv |
Cov ua tau tiv | 0.5-1.5 Ωcm | Wafer xyuas system |
MCLT (haiv neeg tsawg cov neeg nqa khoom lub neej) | ≧50 μs | Sinton BCT-400 (nrog kev nce qib: 1E15 cm-3) |
3Ntsuas
Cov cuab yeej | Specification | Kev Soj Ntsuam Cov Qauv |
Ntsuas | Puv xwm txheej | |
Wafer Sab ntev | 166 ± 0.25 hli | wafer tshuaj xyuas system |
Wafer Txoj kab uas hla | φ223 ± 0.25 hli | wafer tshuaj xyuas system |
Lub kaum sab xis ntawm ib sab uas nyob ib sab | 90° ± 0.2° | wafer tshuaj xyuas system |
Thickness | 180﹢20/﹣10 µm; 170﹢20/﹣10 µm | wafer tshuaj xyuas system |
TTV (Tag nrho cov tuab sib txawv) | ≤27 µm | wafer tshuaj xyuas system |
4 Nto thaj chaw
Cov cuab yeej | Specification | Kev Soj Ntsuam Cov Qauv |
Txiav qauv | DW | -- |
Deg zoo | raws li txiav thiab ntxuav, tsis muaj paug pom tshwm sim, (roj lossis roj, ntiv tes luam tawm, xab npum ntxuav, tsuj nplawm, epoxy / kua nplaum tsis pub) | wafer tshuaj xyuas system |
Pom cov cim / kauj ruam | ≤ 15µm | wafer tshuaj xyuas system |
Hneev | ≤ 40 µm | wafer tshuaj xyuas system |
Warp | ≤ 40 µm | wafer tshuaj xyuas system |
Nti | qhov tob ≤0.3mm thiab ntev ≤ 0.5 hli Max 2 / pcs; tsis muaj V-chip | Looj ob lub qhov muag lossis lub tshuab ua haujlwm soj ntsuam |
Cov kab nrib pleb me / qhov | Txwv tsis pub | wafer tshuaj xyuas system |
Cim npe nrov: p hom m6 monocrystalline hnub ci wafer, Tuam Tshoj, lwm tus neeg, manufacturers, hoobkas, ua nyob rau hauv Suav teb









