N Hom 156.75mm Monocrystalline Hnub Ci Wafer

N Hom 156.75mm Monocrystalline Hnub Ci Wafer
Khoom Taw qhia:
Qhov tseeb hais tias cov thev naus laus zis thev naus laus zis muaj qhov ua tau zoo tshaj plaws hauv kev lag luam kev lag luam yog ua raws li n-hom Cz-Si wafer yog kev tawm tsam ntawm vim li cas n-hom wafers yog cov khoom haum tshaj plaws rau kev ua haujlwm siab ntawm cov hnub ci hlwb. Mus txuas ntxiv rau hauv cov ntsiab lus, muaj qee qhov kev mob ntawm lub cev rau lub superiority ntawm n-hom tiv thaiv p-hom.
Xa kev nug
Tsham tam sim no
Hauj lwm lawm
Kev tsis

CZ silicon crystal growth


Monocrystalline wafer 1


Qhov tseeb hais tias cov thev naus laus zis thev naus laus zis muaj qhov ua tau zoo tshaj plaws hauv kev lag luam kev lag luam yog ua raws li N hom Cz-Si wafer yog kev tawm tsam ntawm vim li cas n-hom wafers yog cov khoom haum tshaj plaws rau kev ua haujlwm siab hnub ci hlwb. Nkag mus ntxiv kom paub meej, muaj qee qhov kev mob ntawm lub cev rau kev ua tiav ntawm N hom tiv thaiv P hom, qhov tseem ceeb tshaj plaws yog:

  • vim tsis muaj boron, tsis muaj ib qho teeb pom kev cuam tshuam dab tsi (LID) tshwm sim hauv p-hom Si wafers, vim boron-oxygen complexes

  • raws li N hom Si tsis rhiab me ntsis rau cov hlau tsis zoo, feem ntau cov tsheb thauj mus los feem ntau tsis ntev ntev hauv n-hom Cz-Si yog siab dua piv rau p-hom Cz-Si

  • N hom Si yog qhov tsis tshua muaj kev cuam tshuam zoo thaum lub sijhawm ua cov cua kub ceev xws li B-diffusion.

1 Cov khoom muaj zog

Cov cuab yeej

Specification

Kev Soj Ntsuam Cov Qauv

Txoj kev loj hlob

CZ


Crystallinity

Monocrystalline

Qhov Tshaj Tawm Etch Txuj CiASTM F47-88

Kev Coj Yam

N-hom

Napson EC-80TPN

Dopant

Phus Thas

-

Cov pa oxygen [Oi]

8E+17 ntawm / cm3

FTIR (ASTM F121-83)

Cov pa roj carbon concentration [Cs]

5E+16 ntawm / cm3

FTIR (ASTM F123-91)

Etch qhov ceev (dislocation ntom)

500 cm-3

Qhov Tshaj Tawm Etch Txuj CiASTM F47-88

Kev taw qhia sab npoo

& lt; 100> ± 3 °

Kev Siv Tshuab Xaj Hluav Taws Xob (ASTM F26-1987)

Qhia ntawm pseudo square sab

& lt; 010> ;,< 001=""> ± 3 °

Kev Siv Tshuab Xaj Hluav Taws Xob (ASTM F26-1987)

2 Cov khoom hluav taws xob

Cov cuab yeej

Specification

Kev Soj Ntsuam Cov Qauv

Cov ua tau tiv

0.2-2.0 Ω.cm

0.5-3.5 Ω.cm

1.0-7.0 Ω.cm

1.5-12 Ω.cm

Lwm qhov tawm tsam

Wafer xyuas system

MCLT (haiv neeg tsawg cov neeg nqa khoom lub neej)

1000 μs (Kev tawm tsam> 1Ωcm)
500 μs (Kev tawm tsam<>Ωcm)

Kev ua si thoob hloov

3 Ntsuas

Cov cuab yeej

Specification

Kev Soj Ntsuam Cov Qauv

Ntsuas

Pseudo square


Bevel ntug cov duab

Hloov


Wafer loj

(Sab ntev * sab ntev * taub)

M0: 156*156*ϕ210 hli

M1: 156.75*156.75* ϕ205 hli

M2: 156.75*156.75* ϕ210 hli

Wafer xyuas system

Lub kaum sab xis ntawm ib sab uas nyob ib sab

90±3°

Wafer xyuas system


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Cim npe nrov: N Hom 156.75mm Monocrystalline Hnub Ci Wafer, Tuam Tshoj, cov chaw muag khoom, chaw tsim khoom, Hoobkas, ua nyob rau hauv Suav teb

Xa kev nug
Yuav daws cov teeb meem zoo li cas tom qab muag?
Nqa cov duab ntawm cov teeb meem thiab xa tuaj rau peb.Tom qab paub meej cov teeb meem, peb
yuav ua kom txaus siab rau koj hauv ob peb hnub.
tiv tauj peb