Polycrystalline hnub ci wafer muaj qhov zoo ntawm tus nqi qis dua li ntawm monocrystalline wafer. Tab sis feem ntau hais lus polycrystalline wafer muaj tsawg dua qhov kev ua tau zoo dua li ntawm ntawm monocrystalline wafer.
Polycrystalline wafer yog cov khoom siv uas muaj ntau yam me me silicon muaju.
1 Cov khoom muaj zog
Cov cuab yeej | Specification | Kev Soj Ntsuam Cov Qauv |
Txoj kev loj hlob | directional solidification | XRD |
Crystallinity | polycrystalline | Qhov Tshaj Tawm Etch Txuj Ci（ASTM F47-88） |
Kev Coj Yam | P-hom | Napson EC-80TPN P/N |
Dopant | Boron | - |
Cov pa oxygen [Oi] | ≦1E+17 ntawm / cm3 | FTIR (ASTM F121-83) |
Cov pa roj carbon concentration [Cs] | ≦1E+18 ntawm / cm3 | FTIR (ASTM F123-91) |
2 Cov khoom hluav taws xob
Cov cuab yeej | Specification | Kev Soj Ntsuam Cov Qauv |
Cov ua tau tiv | 0.5-2 Ωcm (Tom qab anneal) | Wafer xyuas system |
MCLT (haiv neeg tsawg cov neeg nqa khoom lub neej) | ≧2 μs | Kev nqus npe QSSPC |
3 Ntsuas
Cov cuab yeej | Specification | Kev Soj Ntsuam Cov Qauv |
Ntsuas | Xwmfab lossis duab plaub | Wafer xyuas system |
Bevel ntug cov duab | Kab | Wafer xyuas system |
Wafer loj (Sab ntev * sab ntev) | 156mm * 156mm 157mm * 186mm 166mm * 166mm | Wafer xyuas system |
Lub kaum sab xis ntawm ib sab uas nyob ib sab | 90±3° | Wafer xyuas system |
Cim npe nrov: p hom polycrystalline hnub ci wafer nrog rau 166mm * 166mm, Tuam Tshoj, cov chaw muag khoom, chaw tsim khoom, Hoobkas, ua nyob rau hauv Suav teb
