

Hlau Pab Ua Yeeb Yam Siv Tshuaj Ntsuam (MACE) yog ib qho kev tsim ua tshiab anisotropic ntub dej etching txheej txheem uas muaj peev xwm ntawm cov khoom ua tau zoo ntawm cov khoom nruab nrab semiconductor nanostructures los ntawm cov qauv hlau.
Hauv kev pom zoo lees paub txog MACE cov txheej txheem, tusoxidantyog najnpawb kom raug txo nyob rau saum npoo ntawmhlau catalyst, thiab cov qhov (h +) yog txhaj los ntawm hlau catalyst rau Si lossis hluav taws xob (e−) tau pauv los ntawm Si rau cov hlau catalyst. Si hauv qab cov hlau catalyst muaj qhov siab tshaj plawslub qhov siab, yog li ntawd luboxidationthiab kev txhim kho ntawm Si tshwm sim tshwj xeeb hauv qab cov hlau catalyst.
Hnub ci hloov dua siab tshiab zog tau pom tias yuav nce ntxiv thaum SiNWs nrogsiab piv pivua haujlwm nyob rau sab npoo ntawm slar teeb irradiation.
1 Cov mob deg
Tsis | Txheej Txheem | Kev Txom Nyem |
Pem Hauv Ntej | ||
Cov mob deg | Hlau Pab Txhawb Nqa Tshuaj Etching | Tsawg |
Sab Tom Qab | ||
Cov mob deg | Polished lossis textured | Siab lossis qis |
2 Cov khoom muaj zog
Cov cuab yeej | Specification | Kev Soj Ntsuam Cov Qauv |
Txoj kev loj hlob | directional solidification | XRD |
Crystallinity | polycrystalline | Qhov Tshaj Tawm Etch Txuj Ci(ASTM F47-88) |
Kev Coj Yam | P-hom | Napson EC-80TPN P/N |
Dopant | Boron | - |
Cov pa oxygen [Oi] | ≦1E+17 ntawm / cm3 | FTIR (ASTM F121-83) |
Cov pa roj carbon concentration [Cs] | ≦1E+18 ntawm / cm3 | FTIR (ASTM F123-91) |
3 Cov khoom hluav taws xob
Cov cuab yeej | Specification | Kev Soj Ntsuam Cov Qauv |
Cov ua tau tiv | 0.5-2 Ωcm (Tom qab anneal) | Wafer xyuas system |
MCLT (haiv neeg tsawg cov neeg nqa khoom lub neej) | ≧2 μs | Kev nqus npe QSSPC |
4 Ntsuas
Cov cuab yeej | Specification | Kev Soj Ntsuam Cov Qauv |
Ntsuas | Xwmfab lossis duab plaub | Wafer xyuas system |
Bevel ntug cov duab | Kab | Wafer xyuas system |
Wafer loj (Sab ntev * sab ntev) | 156mm * 156mm 157mm * 186mm 166mm * 166mm | Wafer xyuas system |
Lub kaum sab xis ntawm ib sab uas nyob ib sab | 90±3° | Wafer xyuas system |
Cim npe nrov: dub silicon nto p hom polycrystalline hnub ci wafer suav nrog 166mm * 166mm, Tuam Tshoj, cov chaw muag khoom, chaw tsim khoom, Hoobkas, ua nyob rau hauv Suav teb











