N {- Hom M2 Monocrystalline Silicon Wafel {}} square 156.75}} square 156.75}}}} square 156.75}} Cov Qauv Txheem Qauv thiab Kev Pom Zoo Lub Teeb. Tsim kev siv CZ txoj kev thiab phosphorus doping, nws muaj cov khoom muaj cov khoom siv,<100>Kev taw qhia, thiab qhov qis qis tsis sib haum xeeb (tsawg dua lossis sib npaug nrog 500 cmol). Nrog n - hom kev coj ua, 0.2-12 ω ω), nws txhawb nqa lub neej ntev li 1, M2 Wafer tseem muaj cov qauv pov thawj thiab txhim khu kev qha rau kev ua tau ruaj khov hauv MotStream PV daim ntawv thov.
1. Cov Khoom Siv Khoom Siv
|
Ntiag tug |
Kev qhia tshwj xeeb |
Kev Ntsuam Xyuas Txoj Kev |
|
Kev Loj Hlob Qauv |
CZ |
|
|
Crystallinity |
Monocrystalline |
Xav tau cov tswv yim(ASTM F47-88) |
|
Dab tsi hom |
N - hom |
Napson ec-80tpn |
|
Dopant |
Phosphorus |
- |
|
Oxygen Concltration [OI] |
Tsawg dua los yog sib npaug8e +17 ntawm / cm3 |
Ftir (ASTM F121-83) |
|
Cov pa roj carbon ntau [cs] |
Tsawg dua los yog sib npaug5E +16 ntawm / cm3 |
Ftir (ASTM F123-91) |
|
Etch qhov ntom ntom (rho tawm tsam ntom) |
Tsawg dua los yog sib npaug500 cm-2 |
Xav tau cov tswv yim(ASTM F47-88) |
|
Nto Orientation |
<100>3 Degree |
X - rhte ray differaction txoj kev (Astm f26-1987) |
|
Orientation ntawm Pseudo square sab |
<010>,<001>3 Degree |
X - rhte ray differaction txoj kev (Astm f26-1987) |
2.Txoj Khoom Siv Hluav Taws Xob
|
Ntiag tug |
Kev qhia tshwj xeeb |
Kev Ntsuam Xyuas Txoj Kev |
|
Resiveivity |
0.2-2.0 ω.cm 0.5-3.5 ω.cm
1.0-7.0 ω.cm
1.5-12 ω.cm
|
4-Ua Ntej Tiv Thaiv
ntsuas
|
|
McLT (Cov Neeg Muaj Tsawg Carritime) |
Ntau dua los yog sib npaug rau 1000 μs μs (tiv taus> 1.0 ω.cm) Ntau dua los yog sib npaug rau 500 μs (resistivity <1.0 ω.cm
|
Sinton BCT-400 Nyob
(nrog kev txhaj tshuaj theem: 5E14 cm-3)
|
3.Qhov chaw
|
Ntiag tug |
Kev qhia tshwj xeeb |
Kev Ntsuam Xyuas Txoj Kev |
|
NTSIAB LUS |
QASI Square
|
Vernier caliper
|
|
Qhov dav
|
210 ± 0.25 hli
|
Vernier caliper |
|
Tiaj mus rau tiaj
|
156.75 ± 0.35 hli
|
Vernier caliper
|
|
Kaum Ntev
|
8.5 ± 0.5mm
|
Dav {- lub rooj zaum square / pas ntsuas
|
|
Kev loj hlob
|
90℃± 0.2 degree |
Lub pas nrig
|
|
Kaum duab
|
Hloov puab
|
Kev Saib Xyuas Kev Pom
|
|
Txoj kab
|
Tsawg dua los yog sib npaug rau 0.8 hli
|
|
|
TTV (Tas Nrho Thickness Variation) |
Tsawg dua los yog sib npaug 27 µm |
Wafer Soj Ntsuam |
4.Cov Khoom Nto
|
Ntiag tug |
Kev qhia tshwj xeeb |
Kev Ntsuam Xyuas Txoj Kev |
|
Nto Muaj Peev Xwm
|
Stain, roj, kos, tawg, qhov, pob,
Pinhole thiab ntxaib qhov tsis xws luag tsis yog
pub
|
Kev Saib Xyuas Kev Pom
|
|
Tws ntoo
|
Tsis pub muaj cov nti;
Arris: Chips yog inconsecutive:
Tsawg dua 10 ntawm cov neeg sau npe, dej tsawg dua lossis sib npaug rau 0.3mm;
|
Tus kav teb chaws
|
|
Nto budene
|
Dav hlau nto: Ra tsawg dua lossis sib npaug rau 0.6UM;
Cambered nto: ra tsawg dua los yog sib npaug rau 1.0um
|
Kev ntsuas nplaim deg
|
Cim npe nrov: n -} Txoj Hom M2 Monocrystalline Silicon Wafer Cov Lus Qhia, Tuam Tshoj, Cov Chaw Tsim Khoom, Hoobkas, Ua Hauv Suav
