Cov kev cai no txhais n -} Txoj Hom Monocrystalline Silicon Wafers (Loj M10) rau cov hnub ci siab heev. Tsim los ntawm czochralski nrog phosphorus doping, txog li ntawm 5E16 ntawm / cmà pittration (txog li 500 cm⁻², thiab precise nto kev qhia nyob rau hauv 3 degrees ntawm<100>.
Cov khoom siv hluav taws xob nrog suav nrog 1.0 tau rau 7.0 ω.cm thiab cov neeg muaj hnub nyoog siab dua (tsawg kawg 1000 μs).
WHAFERS muaj ib qho zoo pseudo - square geometry nrog sab ntev 182 hli), thiab ib sab ntawm 907 degrees (kam rau 0.2 degrees). Muaj nyob rau hauv thicknesses los ntawm 150 txog 180 μm (nrog rau kev thev taus), lawv xyuas kom meej qhov hloov tuab (TTV siab kawg 27 μm). Cov khoom zoo yog tswj hwm ("raws li kev txiav", muaj kev txwv tsis pub muaj, ntau tshaj 15 μm, thiab warp (siab tshaj 40 μm txhua). Cov hom loj loj txhawb nqa kev lag luam ua haujlwm ntawm kev ua kom zoo ntawm lub teeb.
1. Cov Khoom Siv Khoom Siv
|
Ntiag tug |
Kev qhia tshwj xeeb |
Kev Ntsuam Xyuas Txoj Kev |
|
Kev Loj Hlob Qauv |
CZ |
|
|
Crystallinity |
Monocrystalline |
Xav tau cov tswv yim(ASTM F47-88) |
|
Dab tsi hom |
N - hom |
Napson ec-80tpn |
|
Dopant |
Phosphorus |
- |
|
Oxygen Concltration [OI] |
Tsawg dua los yog sib npaug8e +17 ntawm / cm3 |
Ftir (ASTM F121-83) |
|
Cov pa roj carbon ntau [cs] |
Tsawg dua los yog sib npaug5E +16 ntawm / cm3 |
Ftir (ASTM F123-91) |
|
Etch qhov ntom ntom (rho tawm tsam ntom) |
Tsawg dua los yog sib npaug500 cm-2 |
Xav tau cov tswv yim(ASTM F47-88) |
|
Nto Orientation |
<100>3 Degree |
X - rhte ray differaction txoj kev (Astm f26-1987) |
|
Orientation ntawm Pseudo square sab |
<010>,<001>3 Degree |
X - rhte ray differaction txoj kev (Astm f26-1987) |
2.Txoj Khoom Siv Hluav Taws Xob
|
Ntiag tug |
Kev qhia tshwj xeeb |
Kev Ntsuam Xyuas Txoj Kev |
|
Resiveivity |
1.0-7.0 ω.cm
|
Wafer Soj Ntsuam |
|
McLT (Cov Neeg Muaj Tsawg Carritime) |
Ntau dua los yog sib npaug rau 1000 μ |
Sinton BCT-400
Nyob
(nrog kev txhaj tshuaj theem: 5E14 cm-3)
|
3.Qhov chaw
|
Ntiag tug |
Kev qhia tshwj xeeb |
Kev Ntsuam Xyuas Txoj Kev |
|
NTSIAB LUS |
pseudo square |
|
|
Bevel Ntug Duab
|
voj voog | |
|
Wafer sab ntev |
182 ± 0.25 hli
|
Wafer Soj Ntsuam |
|
Wafer taub |
φ247 ± 0.25 hli |
Wafer Soj Ntsuam |
|
Lub kaum sab xis ntawm cov ntug ib sab |
90℃± 0.2 degree |
Wafer Soj Ntsuam |
|
Qhov tuab |
180 ﹢ 20/﹣10 µm
175﹢ 20/﹣10 µm
170﹢ 20/﹣10 µm
165﹢ 20/﹣10 µm
160﹢ 20/﹣10 µm
150﹢ 10/﹣10 µm
|
Wafer Soj Ntsuam |
|
TTV (Tas Nrho Thickness Variation) |
Tsawg dua los yog sib npaug 27 µm |
Wafer Soj Ntsuam |
4.Cov Khoom Nto
|
Ntiag tug |
Kev qhia tshwj xeeb |
Kev Ntsuam Xyuas Txoj Kev |
|
Txiav txoj kev |
Dw |
-- |
|
Nto Zoo |
Raws li kev txiav thiab ntxuav, tsis pom kev sib kis, (roj lossis roj, ntiv tes stains, epoxy / dos stains tsis tso cai) |
Wafer Soj Ntsuam |
|
Pom cov cim / cov kauj ruam |
Tsawg dua los yog sib npaug rau 15μm |
Wafer Soj Ntsuam |
|
Txoj hluas |
Tsawg dua los yog sib npaug rau 40 μm |
Wafer Soj Ntsuam |
|
Warp |
Tsawg dua los yog sib npaug rau 40 μm |
Wafer Soj Ntsuam |
|
Tws ntoo |
Qhov tob tsawg dua lossis sib npaug rau 0.3 hli thiab ntev dua lossis sib npaug rau 0.5mm max 2 / pcs; tsis muaj v -} nti |
Naked ob lub qhov muag los yog wafer soj ntsuam cov kab ke |
|
Micro Cracks / Qhov |
Tsis pub |
Wafer Soj Ntsuam |
Cim npe nrov: n {- Hom M10 Monocrystalline Silicon Wafer Cov Lus Qhia, Tuam Tshoj, Cov Chaw Tsim Khoom, Hoobkas, Ua Hauv Suav
