Muaj cov kev ua kom muaj hnub nyoog 8 lub hnub los ntawm silicon wafers mus rau qhov kawg ntawm kev npaj txhij hnub ci.
Kauj ruam 1: Daim tshev Wafer
Silicon wafer yog cov cab kuj ntawm hnub ci cell. Qhov zoo ntawm silicon wafer ncaj qha txiav txim siab hloov dua siab tshiab ntawm hnub ci cell, yog li ntawd nws yog ib qhov tsim nyog los ntsuam xyuas cov khoom tuaj silicon wafer. Cov txheej txheem no tsuas yog siv rau kev ntsuas hauv online ntawm qee cov kev lim dej ntawm silicon wafers, xws li qhov chaw npau taws, kev tiv thaiv, P / N hom thiab microcrack, thiab lwm yam. Cov khoom siv tsis siv khoom thauj khoom thiab kev tshem tawm, kev sib tsoo wafer, kev sib xyaw ua ke thiab plaub qhov kev tshawb nrhiav modules.
Ntawm lawv, lub photovoltaic silicon wafer detector detects vuab tsoo roughness ntawm silicon wafer, thiab nyob rau tib lub sij hawm detects lub tsos tsis xws li qhov loj thiab kab pheeb ces kab ntawm silicon wafer. Lub microcrack nrhiav kom tau muab siv los txhawm rau sab hauv microcracks ntawm silicon wafer. Tsis tas li ntawd, muaj ob txoj kev tshawb nrhiav, ib qho ntawm online test module yog tshuaj ntsuam wafer resistivity thiab wafer hom, thiab lwm tus module siv los sim kuaj lub neej tsawg ntawm silicon wafer. Ua ntej kom paub tias muaj hnub nyoog tsawg thiab kev tiv thaiv, kab pheeb ces kaum thiab microcrack ntawm silicon wafer yuav tsum tau kuaj thiab cov pob zeb silicon wafer puas yuav raug tshem tawm. Cov khoom siv wafer yuav tuaj yeem thauj khoom thiab tshem tawm cov wafer, thiab muab cov khoom tsis raug cai nyob hauv qhov chaw ruaj khov, thiaj li los txhim kho cov kev kuaj thiab kev ua haujlwm.
Kauj Ruam 2: Texturing thiab Tu
Kev npaj ntawm cov nplais ntawm monocrystalline silicon suede yog siv cov tshuaj anisotropic ntawm silicon rau lab tus plaub ntawm plaub-tog vaj tsev nyob ntawm lub silicon ntawm txhua txhua centimeter square. Vim muaj ntau qhov kev xav thiab qhov teeb meem ntawm qhov teeb meem ntawm lub teeb, qhov nqus ntawm lub teeb yog nce, thiab qhov luv luv tam sim no thiab kev hloov dua siab tshiab ntawm lub roj teeb raug kho dua.
Silicon anisotropic corrosion solutions yog feem ntau yog kub alkaline ntsiab. Muaj cov hauv paus muaj sodium hydroxide, potassium hydroxide, lithium hydroxide, thiab ethylenediamine. Feem ntau ntawm lawv siv pheej yig sodium hydroxide dilute tov nrog ib cov concentration txog 1% los npaj suede silicon, thiab qhov kub thiab txias yog 70-85 ℃. Txhawm rau kom tau suam uniform, cov cawv xws li ethanol thiab isopropanol yuav tsum muab ntxiv los ua cov kabmob ua haujlwm kom ceev tau qhov khib nyiab ntawm silicon. Ua ntej yuav pib ntawm suede, silicon wafer yuav tsum pib siv thawj qhov dej, thiab 20 ~ 25 microns ntawm alkaline lossis acidic corrosion kua yuav tsum raug siv los tshem tawm. Tom qab lub suede yog corroded, cov tshuaj ntxuav tsev yuav tsum tau nqa tawm. Lub silicon wafers npaj rau saum npoo yuav tsum tsis txhob cia nyob rau hauv dej rau ib lub sij hawm ntev los mus tiv thaiv kab mob.
Kauj ruam 3: Diffusion
Ib cheeb tsam loj ntawm PN nkag mus yog xav paub txog kev hloov lub zog ntawm lub teeb rau hluav taws xob. Lub diffusion rauv taws yog ib yam khoom tshwj xeeb rau kev tsim PN hlws ris ntawm cov hnub ci qis. Lub qhov cub hluav taws xob tawg yog tsim los ntawm plaub qhov chaw: sab qaum ntawm lub nkoj ntawm lub quartz, lub qhov tso pa roj chamber, lub cub tawg lub cev thiab lub qhov rooj rau roj. Feem ntau, cov kua dej ntawm phosphorus oxychloride yog siv los ua qhov kev siv tawm qhov teeb meem. P hom silicon wafers yog muab tso rau hauv lub thawv plaub hau ntawm tubular diffusion rauv taws. Phosphorus oxychloride muab tso rau hauv lub thawv uas siv los ntawm nitrogen ntawm high temperature ntawm 850- 900 degrees Celsius. Phosphorus oxychloride reacts nrog silicon wafers kom tau txais phosphorus atoms. Tom qab lub sijhawm ib ntus, cov xaim phosphorus nkag tau rau txheej txheej ntawm silicon wafers los ntawm txhua qhov chaw, thiab tso rau hauv qhov sib txawv ntawm cov pob zeb silicon, qhov sib txuas ntawm n-type semiconductor thiab p-type semiconductor, uas yog PN hlws ris. PN qhov chaw ua haujlwm tau tsim los ntawm txoj kev no muaj kev ua zoo, qhov tsis sib haum ntawm kev thaiv tsis haum yog tsawg tshaj li 10%, thiab qhov tsawg dua ntawm lub neej tsawg tshaj 10ms. Ua PN hlav yog qhov tseem ceeb tshaj plaws thiab tseem ceeb hauv kev siv hnub ci ntawm tes. Vim tias nws yog tsim ntawm PN hlws tsev, yog li ntawd cov electrons thiab qhov nyob hauv qhov ntws yuav tsis rov qab mus rau qhov qub, yog li tsim ntawm ib qho tam sim no, siv ib lub xov hlau coj tawm tam sim no, yog qhov ncaj qha tam sim no. Cov txheej txheem no yog siv rau hauv kev tsim thiab siv thiab ua cov khoom hnub ci ntawm cov hluav taws xob.
Kauj Ruam 4: Ntaj Kev Raug & Tu
Los ntawm kev siv tshuaj tua kab, cov silicon wafers yog immersed hydrofluoric acid kua los ua kom muaj cov tshuaj tiv thaiv kab mob ua rau lub cev muaj zog hexafluorosilicic acid, thiaj li tshem tawm ib txheej phosphorous silicon iav uas ua rau ntawm lub silicon wafers tom qab diffusion. Nyob rau hauv txoj kev diffusion, POCL3 reacts nrog O2 los tsim cov dej P2O5 nyob rau ntawm cov pob zeb silicon wafer. P2O5 reacts nrog Si los ua cov SiO2 thiab phosphorus atoms. Nyob rau hauv no txoj kev, ib txheej ntawm SiO2 uas muaj phosphorus ntsiab yog tsim nyob rau saum npoo ntawm silicon wafer, uas yog hu ua phosphosilicon iav.
Cov khoom siv rau phosphorus silicon iav yog feem ntau yog tsim los ntawm lub cev, tu tank, servo tsav system, neeg ua haujlwm caj npab, hluav taws xob tswj qhov system thiab tsis siv tshuaj tua kab mob, thiab lwm yam. Lub hwj chim loj yog hydrofluoric acid, nitrogen, compressed cua, dej ntshiab, cua kub cua thiab dej khib nyiab. Hydrofluoric acid yuav yaj ua silica vim hydrofluoric acid reacts nrog silica rau daim nplai silicon tetrafluoride roj. Yog tias hydrofluoric acid ntau dhau lawm, cov silicon tetrafluoride ua los ntawm cov tshuaj tiv thaiv yuav ntxiv cov mob nrog hydrofluoric acid los ua ib qho dej khov kho hexafluorosilicic acid.
Vim yog txoj kev diffusion, txawm tias siv qhov nraub qaum sab nraub qaum, tag nrho cov pob zeb nrog cov xim ntawm silicon wafer yuav tsis txawv txav nrog phosphorus. Cov fais fab ntawm photovenerated sau los ntawm sab xub ntiag ntawm PN hlws tsev yuav ntws mus rau sab nraum qab ntawm PN hlws ris ntawm ntug ntawm thaj chaw phosphorous, ua qhov luv Circuit Court. Yog li no, lub pob zeb doped ncig lub hnub ci ntawm tes yuav tsum tau ua rau kom tshem tau cov PN hlws ris ntawm ntug ntawm lub xov tooj ntawm tes.
Plasma etching feem ntau yog siv los ua kom tiav txoj haujlwm no. Plasma etching yog ib txoj hau kev uas niamtxiv molecule gas reactive CF4 ionizes thiab cov ntaub ntawv cov ntshav raws li kev cia siab ntawm rf hwj chim hauv siab. Plasma yog tsim los ntawm electronons thiab ions, cov pa roj hauv cov tshuaj tiv thaiv Chamber los ntawm kev cuam tshuam ntawm electrons, ntxiv rau kev hloov mus rau hauv ions, tab sis kuj tuaj yeem nqus tau energy thiab tsim kom muaj coob leej ntau pawg. Cov pab pawg neeg tuaj yeem ncav cuag cov dej SiO2 ntawm diffusion lossis nyob rau hauv qhov kev ua haujlwm ntawm cov hluav taws xob, qhov chaw lawv muaj tshuaj lom neeg nrog cov txheej txheem etched, thiab ua rau cov khoom tsis haum cov khoom uas khiav tawm ntawm cov khoom ntawm etched thiab muab rho tawm los ntawm kab noj hniav los ntawm lub tshuab nqus tsev.
Kauj Ruam 5: ARC (Ua Txhaum Cai Txhaum Cai) Txhiv
Cov kev xav tau ntawm cov polished silicon nto ntawm plated anti-reflection zaj duab xis yog 35%. Yuav kom txo tau qhov saum npoo khoom thiab txhim kho qhov kev hloov ntawm lub roj teeb, ib txheej ntawm silicon nitride anti-reflection zaj duab xis yuav tsum tau tso. Nta, PECVD khoom siv feem ntau yog siv los npaj cov kab xev thaij hauv kev tsim muaj. PECVD yog ntshav nce hlwb tshuaj lom neeg. Nws yog lub hauv paus ntsiab lus ntawm kev tswj ntshav siab tsawg tshaj plaws uas siv los ua lub zog qhov chaw, cov qauv ntawm lub cathode glow discharge nyob rau hauv qis dua, siv lub ci tawm qhov cua sov mus kuaj kom txog thaum muaj kub tshaj, thiab dhau mus rau cov roj cua SiH4 thiab NH3, roj los ntawm cov tshuaj lom neeg cov kua tshuaj thiab cov ntshav, ua cov yeeb yaj kiab hauv cov qauv ntawm cov qauv no yog silicon nitride nyias films. Feem ntau, cov yeeb yaj kiab nyias uas tso los ntawm cov tshuaj uas siv los ntawm cov ntshav dej khov lawm yog 70nm tuab. Ib zaj yeeb yaj duab ntawm no tuab yog optically haumxeeb. Siv lub hauv paus ntsiab lus ntawm cov yeeb yaj kiab nyias, lub teeb pom kev zoo tuaj yeem txo tus nqi, lub luv luv tam sim no thiab cov zis ntawm lub roj teeb tau zoo heev, thiab qhov ua tau zoo kuj zoo tuaj.
Kauj Ruam 6: Hu Xovtooj
Vijtsam luam tawm hnub ci lub hlwb tau ua rau PN txuas ntxiv tom qab lint ua, diffusion thiab PECVD thiab lwm yam kev ua, uas muaj peev xwm tsim hluav taws xob hauv qab no. Yuav kom tshem tawm cov khoom tam sim no, qhov zoo thiab tsis pom zoo electrodes yuav tsum tau ua rau ntawm lub roj teeb. Muaj ntau txoj hauv kev los ua cov electrodes, thiab kev luam ntawv yog qhov txheej txheem tshaj plaws los ua hnub ci electrodes. Vijtsam luam YUAV SIV COV NTSIAB LUS TUS TXHUA YAM UAS YUAV TSUM TAU LOS NTAWM TXHUA YAM TUS NEEG YOOJ YIM LAWM
Cov cuab yeej muaj peb ntim: nyiaj muab luam tawm nyob rau sab nraum qab ntawm lub roj teeb, txhuas txhuam luam ntawv nyob rau sab nraum qab ntawm lub roj teeb thiab cov luam nyiaj luam ntawv nyob rau ntawm lub taub hau ntawm lub roj teeb. Nws txoj haujlwm ua haujlwm yog: siv mesh mesh mesh los ntawm qhov loj me, nrog rau khawb hauv qhov mesh ntawm kev siv lub siab, thaum tsiv mus rau lwm kawg ntawm tus hlau mesh. Cov cwj mem yog zawm ntawm lub mesh ntawm seem nraaj rau lub substrate thaum nws tsiv. Vim yog qhov ua kom zoo ntawm qhov muab tshuaj txhuam, qhov kev txav yog kho nyob rau hauv ntau yam. Hauv kev luam ntawv, cov khib nyiab yog ib txwm nyob rau hauv txoj kab ncaj nraim nrog lub vijtsam tshuab luam ntawv thiab cov khoom siv, thiab txoj hlua tiv thaiv nrog txuag kom tiav cov lus luam tawm.
Kauj ruam 7: Sintering
Sintering sai sai tom qab kuaj zauv ntawm silicon wafers, tsis tuaj yeem siv ncaj qha, yuav tsum tau sintering los ntawm sintering taws, cov organic reagent nplaum combustion, seem uas yuav luag ntshiab, vim cov nyhuv ntawm iav thiab ze rau cov nyiaj electrode ntawm silicon wafers . Thaum nyiaj electrode thiab crystalline silicon nyob rau hauv qhov kub ntawm qhov kub ntawm eutectic, crystalline silicon atoms nrog cov kev faib ua feem xyuam rau cov khoom siv roj electrode molten, sib dhos thiab ohmic hu rau electrode, txhim kho qhov hluav taws xob qhib qhov hluav taws xob ntawm tes thiab sau kom muaj ob qhov tseem ceeb, nyob rau hauv thiaj li yuav txhim kho qhov kev hloov dua tshiab ntawm hnub ci cell.
Sintering rauv yog faib ua peb theem: presintering, sintering thiab txias. Lub hom phiaj ntawm kev ua kom zoo dua qub yog los ua kom tau thiab hlawv cov phom polymer hauv lub slurry. Hauv qhov sintering theem, ntau lub cev thiab tshuaj lom neeg yog ua tiav hauv lub cev sintering los ua tus qauv ua qauv tawv thiab ua tiag tiag muaj cov yam ntxwv uas tiv taus. Nyob rau qib no, qhov kub txog qhov ncov. Hauv qhov txias thiab txias theem, lub khob txias, hardens thiab solidifies thiaj li hais tias tus qauv tawv resistive tsau sticks rau lub substrate.
Kauj Ruam 8: Kev Xeem thiab Tshuaj Hloov
Tam sim no npaj txhij mus-rau-dho lub hnub ci hlwb raug sim nyob rau hauv simulated hnub ci mob thiab tom qab ntawd mam li cais thiab txheeb raws li lawv cov kev ua tau zoo. Qhov no yog xyuas los ntawm lub hnub ci kuaj cell uas tau txais kev tshuaj ntsuam thiab hloov cov qe ntshav. Lub Hoobkas cov neeg ua haujlwm tsuas yog xav thim lub hlwb los ntawm kev ua haujlwm ntawm lub chaw ua haujlwm uas lub tshuab ntaus cim lub tshuab.
Lub hnub ci cell ces yeej yog ib yam khoom tshiab uas siv rau hauv lub rooj sib txoos ntawm lub hnub ci PV ua haujlwm. Nyob ntawm lub plhws ntawm cov txheej txheem thiab cov txheej txheem silicon wafer zoo, cov txiaj ntsim kawg hauv daim ntawv ntawm lub hnub ci ntawm lub cev yog ntxiv mus rau hauv ntau lub hnub zoo ntawm lub hnub ci zoo.
Peripheral khoom thiab tej yam kev mob
Khoom siv hluav taws xob hauv kev tsim cov roj teeb, hluav taws xob, dej, faj, hvac, nqus tsev, qhov cub tshwj xeeb thiab lwm qhov chaw yuav tsum tau siv. Kev tiv thaiv hluav taws thiab kev tiv thaiv ib puag ncig yog ib qho tseem ceeb kom ntseeg tau tias muaj kev nyab xeeb thiab kev loj hlob zoo.
Ib lub hnub ci kab hluav taws xob ntau tshaj li ntawm 50MW, tsuas yog cov txheej txheem thiab cov khoom siv hluav taws xob siv zog txog li 1800KW. Tus txheej txheem ntawm cov dej ntshiab yog li 15 tuj ib teev, thiab dej zoo yuav tsum ua kom tau raws li cov txheej txheem ew-1 hauv Tuam Tshoj tus e-qib dej GB / t11446.1-1997. Cov dej txias ntawm cov txheej txheem yog li ntawm 15 tuj ib teev, qhov loj me me hauv dej yuav tsum tsis pub ntau tshaj 10 microns, thiab qhov dej txias yuav tsum yog 15-20 ℃. Nqus plua plav tawm yog txog 300 M 3 / H. Nws kuj yuav tsum tau hais txog 20 cubic meters ntawm nitrogen thiab 10 cubic meters ntawm oxygen. Xav txog kev ruaj ntseg ntawm cov roj cua tshwj xeeb xws li silane, nws yuav tsum tsim kom tau ib qho roj tshwj xeeb caij nyoog kom paub meej meej txog kev nyab xeeb txog kev nyab xeeb. Tsis tas li ntawd, silane combustion ntauwd thiab dej phwj tuaj kho qhov dej kuj yog qhov tseem ceeb rau cov khoom siv ntawm tes.
