Tau qhov twg los: mtiinstruments
ASTM F657:
Qhov kev ncua deb los ntawm kev hla ntawm cov ntsiab lus sib piv ntawm sab pem hauv ntej thiab sab nraub qaum. Thickness yog qhia hauv microns lossis mils (thousandths ntawm nti).
Tag Nrho Thickness Variation (TTV)
ASTM F657:
Qhov sib txawv ntawm qhov ntau thiab tsawg kawg qhov tseem ceeb ntawm cov tuab ntsib thaum lub sij hawm luam qauv qauv lossis cov ntsuas ntawm cov ntsuas. TTV yog qhia hauv microns lossis mils (txhiab tus ntawm ib nti).
Daim duab saum toj no qhia qhov kev zam txim nyob nruab nrab ntawm ob txoj kev ntsuas kev sib cuag. Los ntawm kev soj ntsuam kev hloov ntawm lub ntsej muag sojntsuam sab saud thiab sab sauv wafer saum npoo (A) thiab lub ntsej muag hauv qab thiab lub ntsej muag sab hauv qab (B), tuab tuaj yeem suav. Ua ntej tshaj tawm cov kab ke yuav tsum tau ntsuas nrog lub tshuab ntxaij ntawm cov tuab tuab (T w ). Lub cheeb tsam ntawm cov tuab paub tau muab tso nruab nrab ntawm qhov kev sojntsuam thiab ib qho sojntsuam sab saud rau wafer qhov sib txawv (A) thiab qis kev sojntsuam mus rau qhov tsis muaj teebmeem (B). Tag nrho qhov sib txawv (Gtotal) nruab nrab ntawm cov qaum thiab qis hauv qhov kev ua tiav yuav raug xam raws li hauv qab no:
G tag nrho = A + B + T w
Nrog cov kab ke ua kom zoo, tos cov tsis paub ntawm tuab tsis tuaj yeem ntsuas tam sim no. Thaum cov wafer tso rau ntawm qhov ntsuas, tus nqi tshiab ntawm A thiab B xav tau. Thickness yog xam raws li hauv qab no:
T w = G tag nrho - (A + B)
Thaum lub sij hawm ntsuas cov thev naus laus zis ntawm cov roj hmab siv roj, ntsuas cov qhab nia ntsuas ntawm cov khoom taw tes thiab muab khaws cia. Tom qab ua tiav ntawm lub scan, TTV yog xam raws li hauv qab no:
TTV = T max - T min
TSIS TXHOB NRHIAV KEV CAI SAWV DAWS
ASTM F534 3.1.2:
Qhov sib txawv ntawm qhov chaw nruab nrab ntawm cov ntsiab lus nruab nrab ntawm qhov nruab nrab tsis pub dawb, tsis muaj ntaub thaiv los ntawm cov chaw nruab nrab sab nraud los ntawm cov dav hlau tsim los ntawm peb lub ntsiab lus sib npaug ntawm lub voj voos nrog cov taub uas tau teev tsawg dua li cov nominal kab ntawm lub wafer.
Median nto:
Qhov chaw ntawm cov ntsiab lus hauv cov wafer equidistant ntawm sab pem hauv ntej thiab sab nraum qab. Thaum ntsuas thiab laij tawm hneev, nws yog ib qho tseem ceeb kom nco ntsoov tias qhov chaw nruab nrab sab hauv ntawm wafer yuav tsum paub. Los ntawm ntsuas qhov ntsuas qhov nruab nrab ntawm qhov nruab nrab sab hauv, thaj tsam hauv cheeb tsam kev hloov pauv ntawm qhov nruab nrab ntawm qhov nruab nrab ntawm wafer raug tshem tawm ntawm qhov muab xam.
Saum toj no qhia cov kev sib raug zoo ntawm wafer nruab nrab nto ntawm ob sojntsuam ntsej muag qhov twg:
D = Qhov deb ntawm lub ntsej muag sab saud thiab qib qis
A = Qhov kev ncua deb los ntawm qaum kev sojntsuam mus rau sab saum toj wafer nto
B = Qhov kev ncua deb ntawm qhov qis qis mus rau hauv qab wafer nto
Z = Qhov kev ncua deb ntawm wafer nruab nrab nto thiab taw tes rau nruab nrab ntawm qhov kev sojntsuam sab sauv thiab qis dua (D / 2)
Txhawm rau txiav txim siab tus nqi ntawm Z ntawm txhua qhov chaw ntawm lub wafer, muaj ob qhov sib luag:
Z = D / 2 - A - T / 2 thiab Z = -D / 2 + B + T / 2
Kev daws ob qho tib si rau Z, tus nqi tuaj yeem txiav txim siab tsuas yog:
Z = (B - A) / 2
Txij li hneev yog ntsuas ntawm qhov chaw ntawm lub wafer nkaus xwb, peb (3) taw qhia dav hlau txog ntug ntawm wafer yog suav. Tus nqi ntawm cov hneev yog tom qab suav los ntawm kev ntsuas qhov chaw ntawm qhov nruab nrab saum npoo ntawm qhov nruab nrab ntawm wafer thiab txiav txim siab nws qhov deb ntawm kev siv dav hlau. Nco ntsoov tias nyo hau tuaj yeem yog tus naj npawb zoo lossis tsis zoo. Tus zauv nruab nrab txhais tau qhov chaw nruab nrab ntawm nruab nrab saum npoo yog siab dua peb qhov taw qhia lub dav hlau. Kev ntsuas tsis zoo taw qhia qhov chaw nruab nrab ntawm nruab nrab saum npoo yog hauv qab ntawm peb lub taw qhia lub dav hlau.
CEEB TOOM CEEB TSHEEJ RAU LUB SOLAR KEV LAG LUAM
ASTM F1390:
Qhov sib txawv ntawm qhov siab tshaj plaws thiab qhov tsawg kawg mus ntawm nruab nrab sab nruab nrab ntawm qhov dawb, tsis muaj dab tsi thaiv ntawm cov ntaub ntawv los ntawm qhov chaw siv. Zoo li cov hneev, warp yog qhov kev ntsuas ntawm qhov sib txawv ntawm qhov nruab nrab lub nruab nrab ntawm wafer thiab ib qho chaw siv dav hlau. Warp, txawm li cas los xij, siv tag nrho nruab nrab ntawm wafer es tsis txhob tsuas yog txoj haujlwm ntawm lub chaw nruab nrab. Los ntawm saib tag nrho cov wafer, warp muab cov kev ntsuas tau txiaj ntsig ntau dua ntawm qhov tseeb cov qauv siv wafer. Qhov chaw ntawm lub nruab nrab saum npoo yog suav raws nraim li nws rau hneev thiab qhia saum toj no. Rau qhov kev txiav txim siab warp, muaj ob txoj kev xaiv rau kev tsim kho ntawm lub dav hlau siv. Ib qho yog tib qho taw tes dav hlau ib ncig ntawm ntug ntawm lub wafer. Lwm qhov yog los ntawm kev ua cov sib tw tsawg kawg kom haum qhov nruab nrab ntawm cov ntaub ntawv nruab nrab sab uas xav tau thaum ntsuas ntsuas. Warp tom qab ntawd tau suav los ntawm kev nrhiav qhov siab tshaj plaws ntawm qhov siv dav hlau (RPD max ) thiab qhov sib txawv yam tsawg kawg nkaus ntawm qhov siv dav hlau (RPD min ). RPD max txhais tias qhov loj tshaj plaws deb saum toj dav hlau siv thiab yog tus lej zoo. RPD min yog qhov loj tshaj plaws nrug hauv qab dav hlau siv thiab yog tus lej tsis zoo.
Daim duab saum toj no yog kev piv txwv ntawm kev suav ntawm warp. Hauv qhov ua piv txwv RPDmax yog 1.5 thiab pom tias qhov chaw siab tshaj plaws ntawm qhov nruab nrab sab saud saum dav hlau siv. RPDmin yog - 1.5 thiab pom tias qhov chaw siab tshaj plaws ntawm qhov nruab nrab qis dua hauv qab ntawm qhov dav hlau ya. Nco ntsoov warp yog ib txwm muaj txiaj ntsig zoo.
Warp = 1.5 - (-1.5) = 3
Nws tseem qhia txog qhov tseem ceeb ntawm kev noj ob qho tib si hneev thiab warp nyeem. Qhov nruab nrab ntawm lub dav ntawm wafer qhia kev sib tshuam txoj kab siv dav hlau ntawm qhov chaw wafer, yog li ntawd, ntsuas lub hneev nti yuav xoom. Tus nqi warp xam yog qhov tseem ceeb tshaj nyob rau hauv cov ntaub ntawv no raws li nws qhia tus neeg siv lub wafer puas muaj duab tsis xwm yeem.
