Tau qhov twg los: spectra-physics.com
Muaj peev xwm ntawm kev tu lub sau tawv tawv lossis tawv
Cov txheej txheem tsis sib cuag nrog tus nqi tsawg kawg ntawm kev ua haujlwm
Txo chipping, micro-ua kom tawg, thiab de-lamination
Nqaim txiav dav pub tau ntau qhov chaw rau ib tus tau txais
Txoj kev thev naus laus zis ntau txhais tau tias ntau qhov ruaj khov, txhim khu kev qha khoom ntawm tus nqi qis
Hnub ci PV PERC Laser Scribing
Muaj ob peb kauj ruam tseem ceeb rau kev tsim PERC lub hnub ci hlwb. Ua ntej, sab nraub qaum ntawm lub xov tooj yog coated nrog tshwj xeeb dielectric txheej, feem ntau yog SiO2, Al2O3, SiNx, lossis qee yam ua ke nrog. Cov txheej txheem dielectric raws li thov yog tas mus li, thiab yog li nws tsim nyog los tsim kev qhib hauv cov txheej txheem tom ntej rau kev sib cuag ohmic. Txoj hauv kev ua haujlwm zoo tshaj plaws no yog siv laser los ua ablate dielectric zaj duab xis thiab ua kom pom cov xaim hluav taws xob sab hauv qhov tsim yam xav tau - feem ntau nqaim kab txaij. Aluminium metallization yog tom qab thov rau sab saum toj ntawm dielectric txheej. Aluminium paste yog tshuaj ntsuam luam tawm mus rau qhov no thiab tom qab ua kom thermal annealing txheej txheem alloys cov txhuas nrog cov nplais laser-thev naus laus zis los ua cov xov tooj zoo ohmic.
Thaum PERC sau qhov ntsuas geometries muaj qee qhov sib txawv, ib lub xov tooj 6 "feem ntau yuav muaj li ntawm 75 txog 300 laser kab sau uas ntev ~ 155 hli ntev, 30-80 µm dav, thiab sib nrug li 0.5-2 hli. Txog ntawm 1-mm txoj kab sib cais, qhov ntev tag nrho ntawm PERC cov kws sau ntawv ntawm ib qho kev zam tsuas yog kwv yees li 25 meters. Lub hom phiaj ua cov nqi uas xav tau los ntawm kev lag luam tuaj yeem siab txog 3,600 WPH (kev zam rau ib xuab moos), sib npaug nrog qhov xav tau ceev ntawm 25 m / s. Ceev ceev 2-axis galvo scanners li zoo li kiv duab lub teeb duab polygon tuaj yeem ua tiav qhov nrawm.
LED Sau Ntawv
Laser scribing LED wafers yog qhov nyuaj vim tias cov khoom siv yog pob tshab los ntawm qhov pom ntawm ntu ntawm lub tshuab hluav taws xob. GaN yog cov pob tshab hauv qab 365 nm, thiab sapphire yog ib pob tshab tshaj 177 nm. Yog li cov zaus sib npaug (355 nm) thiab zaus zaus (266 nm) diode-pumped solid state (DPSS) Q-switched lasers yog qhov kev xaiv zoo tshaj plaws rau LED scribing. Thaum excimer lasers kuj tseem muaj nyob hauv qhov ntau ntawm yoj, DPSS lasers muaj ntau me me hneev taw thiab tuaj yeem ua tiav ntau txoj kev nqaim txiav dav thiab yuav tsum tau ua txij nkawm tsawg.
Los ntawm kev txo qhov micro-ua kom tawg thiab sib kis, laser sau ntawv tso cai rau cov cuab yeej ntawm LED kom muaj ntau qhov sib luag, txhim kho ob qho tib si tawm thiab dhau. Vim tias muaj feem ntau yuav raug txiav txim siab ntau dua li 20,000 ntau ntawm cov khoom siv roj LED ntawm lub kaum sab xis uas siv wafer, txiav qhov dav uas qhov cuam tshuam tawm tau. Txo micro-nrib pleb thaum txoj kev tuag sib cais txheej txheem kuj tau pom tias yuav txhim kho kev ntseeg tau ntev ntev ntawm cov khoom siv LED. Cov paib tau txhim kho nrog laser scribing los ntawm kev txo qis wafer tawg. Lub nrawm ntawm lub laser sau thiab tawg txheej txheem yog tseem ntau dua ntau dua li ib txwm siv tshuab txiav. Cov txheej txheem dav dua siab ntev ntawm cov lasers thiab tshem tawm ntawm cov hniav hnav thiab tsoo tawg txhais lus rau cov txheej txheem tsim kev lag luam zoo dua qub.
Silicon Thin Film Hnub Ci Kev Sau Ntawv
Diode-pumped solid state (DPSS) lasers tau ua pov thawj lawv cov nqi hauv kev tsim cov a-Si nyias zaj duab xis. Lub tshuab hluav taws xob q-tshuab hluav taws xob tau siv rau peb lub hauv paus ntsiab lus ntawm cov txheej txheem sau npe - hu ua P1, P2, thiab P3 tus kws sau ntawv - uas cais cov cuab yeej loj hauv cov twj sib txuas ua ke ntawm cov duab sib txuas sib txuas photovoltaic. Cov txheej txheem sau ntawv koom nrog kev tshem tawm ntawm ntau cov nyias zaj duab xis (0.2 - 3.0 typicalm raug) cov ntaub ntawv nrog cov khoom sib xyaw kom tsawg rau lub khob substrate lossis lwm zaj duab xis.
Rau P1 sau ntawv, zaj duab xis nyias ntawm TCO (pob tshab ua rau oxide) cov khoom siv - feem ntau SnO2 - raug tshem tawm los ntawm iav txheej, thiab feem ntau ua tiav nrog 1064 nm Q-hloov lub lasers. Cov txheej txheem no yuav tsum tau muaj lub ntsej muag laser siab dua vim tias qhov pom kev tsis meej thiab cov tshuab tsis sib haum ntawm TCO zaj duab xis. Nrog Spectra-Physics HIPPO ™ 1064-27, 50 widem dav P1 tus kws sau ntawv tau ua tiav ntawm kev ceev nrawm hauv kev lag luam. Lub laser lub plawv luv dav dav thiab qhov tshwj xeeb mem tes-rau-mem tes lub zog ruaj ntseg tso cai rau kev ua ntawm 200 kHz PRF (mem tes rov ua dua zaus), uas txhais tau meej rau sau ceev ntawm 8 m / sec.
P2 thiab P3 tus kws sau ntawv feem ntau siv 532 nm lasers, feem ntau vim tias lub teeb muaj zog nqus cov silicon solar absorber txheej. Tus P2 sau ntawv tsuas tshem tawm cov silicon txheej nkaus xwb, thaum lub P3 sau ntawv tshem tawm cov xov tooj ntxiv hu rau hlau / TCO zaj duab xis. Ib qhov luv mem tes dav yog qhov tseem ceeb rau kev ua tiav qhov zoo tshaj plaws-kev ntsuas cov txiaj ntsig. Thaum ua ke nrog zoo heev lub plawv dhia kev ruaj ntseg ntawm siab PRF, sau tus lej ntawm 12 m / sec yog ua tiav nrog Spectra-Physics HIPPO 532-15 laser system ua haujlwm ntawm 160 kHz PRF.
Lasers rau Kev Sau Ntawv
Cov Lus Cim Thov
LED Sau Ntawv
Amorphous Silicon Thin Film Hnub Ci Sau Ntawv
Tej Hub Sau Ntawv
Cov khoom siv Ceramic tau siv dav hauv microelectronics, semiconductor, thiab LED teeb pom kev lag luam vim tias lawv cov hluav taws xob muaj hluav taws xob thiab muaj cov khoom ua tau zoo, thiab ntxiv rau lawv cov hightemperature-kev muaj peev xwm. Lawv lub brittleness ua rau laser ua kom zoo nkauj thaum piv nrog cov pa machining, tshwj xeeb rau kev tsim ua qhov nce me me thiab zoo nkauj uas yuav tsum muaj cov khoom lag luam siab heev ntim.®Cov Pulsed UV thiab Green Lasers rau cov ntaub ntawv ntxiv.
Silicon Wafer Ntawv Sau
Txhawm rau qhia qhov zoo dua ntawm TimeShift thev naus laus zis tshuab mem tes splitting muaj peev xwm, peb tsim laser scribes ntawm tib sau ceev thiab PRF rau ntau qib kev npliag lus. Ob pawg ntawm cov ntaub ntawv raug khaws; ib qho nrog cov mem tes tawm ntawm ib qho 25 ns mem tes, thiab ib qho tawg ntawm tsib 5 ns ncua mem tes sib cais los ntawm 10 ns. Sau cov ntaub ntawv tob qhia qhov tseeb kom zoo dua ntawm kev siv mem tes splitting tawg micromachining hla ib leeg mem tes machining. Kev nce ntawm ablation qhov tob ntawm 52% mus rau 77% tau pom nyob ntawm qib npliag. Peb kuj tau pom kev txhim kho hauv kev ua tau zoo ntawm kev sib cais mem tes scribe. Saib iav txiav thiabSilicon ScribingExcel nrog Quasar®TimeShift ™ Technologyfor ntaub ntawv ntxiv.
